Twodimensional hybrid simulation of dualfrequency capacitively coupled CF<sub>4</sub>plasma

王帅 Wang Shuai; 徐翔 Xu Xiang; 王友年 Wang Younian

doi:10.3788/hplpb20132509.2297

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Twodimensional hybrid simulation of dualfrequency capacitively coupled CF₄plasma

王帅 Wang Shuai 徐翔 Xu Xiang 王友年 Wang Younian

Year: 2013 Journal: High Power Laser and Particle Beams Vol: 25 (9)Pages: 2297-2302 Publisher: Shanghai Institute of Optics and Fine Mechanics

DOI: 10.3788/hplpb20132509.2297

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Plasma Diagnostics and Applications

Physical Sciences → Engineering → Electrical and Electronic Engineering

Plasma Applications and Diagnostics

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Particle accelerators and beam dynamics

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Twodimensional hybrid simulation of dualfrequency capacitively coupled CF₄plasma

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