ZINC-OXIDE THIN FILMS FOR INTERGRATED-SENSOR APPLICATIONS

Abstract

Integrated sensors based on the piezoelectricity and pyroelectricity in zinc-oxide thin fi lms have been fabricated compatibly with conventional NMOS technology.A study of material and el\;ctrical pro perties of the zinc-oxide fi lms, prepared\ by planar magnetron .sputtering, has been carried \ out.For 1-µm thick fi lms, the measured piezoelectric coefficient is d 33 = 14.4X10-12CN-1 and the pyroelec tric coefficient is p 0 = 1.4xl0-9Ccm-2 K-1 • In practi cal integrated sensor designs, these films have yielded voltage responses of 5.2 mV /gm (piezoelectric effect) and 150 m V /K (pyroelectric effect).