Three-dimensional coordinate measurement of microstructures based on nano measuring machine

Junjie Wu

doi:10.37188/ope.20202810.2252

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JOURNAL ARTICLE

Three-dimensional coordinate measurement of microstructures based on nano measuring machine

Junjie Wu

Year: 2020 Journal: Optics and Precision Engineering Vol: 28 (10)Pages: 2252-2259

DOI: 10.37188/ope.20202810.2252

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Keywords:

Nano- Coordinate-measuring machine Coordinate system Microstructure Materials science Computer science Biological system Mechanical engineering Engineering Artificial intelligence Composite material Biology

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Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Advanced machining processes and optimization

Physical Sciences → Engineering → Mechanical Engineering

Three-dimensional coordinate measurement of microstructures based on nano measuring machine

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