JOURNAL ARTICLE
CMOS-MEMS capacitive tactile sensor with vertically integrated sensing electrode array for sensitivity enhancement
Meng-Lin HsiehSheng-Kai YehJia-Horng LeeMing-Ching ChengWeileun Fang
Year: 2020 Journal: Sensors and Actuators A Physical Vol: 317 Pages: 112350-112350 Publisher: Elsevier BV
Keywords:
Tactile sensor Capacitive sensing Materials science Sensitivity (control systems) Capacitance Microelectromechanical systems SIGNAL (programming language) Fabrication Electronic engineering Acoustics Electrode Optoelectronics Electrical engineering Engineering Computer science
Metrics
24
Cited By
1.13
FWCI (Field Weighted Citation Impact)
27
Refs
0.74
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Tactile and Sensory Interactions
Life Sciences → Neuroscience → Cognitive Neuroscience
Muscle activation and electromyography studies
Physical Sciences → Engineering → Biomedical Engineering
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