Self-powered pressure sensors based on triboelectric nanogenerator

Abstract

In order to collect mechanical energy in the environment for self-powered sensor applications, a self-powered capacitive pressure sensor with liquid alloy composite as electrode is developed based on triboelectric nanogenerator (TENG). A micro-pyramid structure is fabricated on the surface of polydimethylsiloxane (PDMS) to improve the performance of the pressure sensor. Test results show that the sensitivity of the pressure sensor is increased by 86.26% compared with the sensor without the micro-pyramid structure. The sensor also has an outstanding output performance. When resistance is 100 MΩ, power output has reached nearly 64 μW.