JOURNAL ARTICLE

Special Issue “Magnetron Sputtering Deposited Thin Films and Its Applications”

Frédéric SanchetteAlain Billard

Year: 2020 Journal:   Coatings Vol: 10 (11)Pages: 1072-1072   Publisher: Multidisciplinary Digital Publishing Institute

Abstract

The physical vapour deposition processes, and in particular different variants of sputtering, have reached a maturity making possible industrial applications in numerous fields such as mechanics [...]

Keywords:
Physical vapor deposition Sputtering Sputter deposition Maturity (psychological) Deposition (geology) Materials science Thin film Vapour deposition High-power impulse magnetron sputtering Engineering physics Cavity magnetron Optoelectronics Nanotechnology Metallurgy Computer science Physics Geology Psychology

Metrics

7
Cited By
0.76
FWCI (Field Weighted Citation Impact)
21
Refs
0.67
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry

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