Detection Area Evaluation of Tactile Sensor Using Microcantilever Embedded in Elastomer

Abstract

We fabricated a MEMS tactile sensor which can detect a wide area by sealing a cantilever with a 4.2 mm thick and 50 mm square elastomer. To evaluate the detection range of this sensor, dependence of response to application of normal force on the distance from the cantilever was evaluated. As a result, it is shown that the cantilever can detect force application up to around 5 mm away from it. In addition, it is shown that the sensitivity to force applied just above the cantilever becomes small because the lateral and vertical deformations of the elastomer cancel each other. On the other hand, it is found that the sensitivity monotonically decreases with distance from the cantilever in the cross direction. Therefore, it is considered that this sensor can estimate the position of force application in 2-dimensional surface by using several differently oriented cantilevers.