Subtractive patterning: High-resolution electrohydrodynamic jet printing with solvents

Abstract

Advancements in 3D printing have initiated a paradigm in device fabrication. Electrohydrodynamic jet (e-jet) printing is a high-resolution 3D printing method that enables customizable patterning of thin-film structures, while reducing fabrication complexity and achieving high-resolution patterns with a wide variety of materials. However, to date, e-jet printing has focused on additive material deposition, rather than patterning through material subtraction. This work proposes displacement-based e-jet printing using solvent inks for subtractive patterning of polymer thin films, with microscale resolution in the x–y plane and nanoscale control in the z (dissolving) direction. The behavior of displacement-based e-jet printing is characterized using atomic force microscopy, and two methodologies are developed for controlling the linewidth and displaced depth. An example of area-selective thin film deposition on displacement-based e-jet patterns is provided to demonstrate the applicability of this patterning technique for printable microscale devices.