Low-loss D-shape Silicon Nitride Waveguides Using a Dielectric Lift-off Fabrication Process

Qiancheng Zhao; Jiawei Wang; Nitesh Chauhan; Debapam Bose; Naijun Jin; Renan Moreira; Ryan O. Behunin; Peter T. Rakich; Daniel J. Blumenthal

doi:10.1364/cleo_si.2020.sth1j.3

JOURNAL ARTICLE

Low-loss D-shape Silicon Nitride Waveguides Using a Dielectric Lift-off Fabrication Process

Qiancheng Zhao Jiawei Wang Nitesh Chauhan Debapam Bose Naijun Jin Renan Moreira Ryan O. Behunin Peter T. Rakich Daniel J. Blumenthal

Year: 2020 Journal: Conference on Lasers and Electro-Optics Vol: 36 Pages: STh1J.3-STh1J.3

DOI: 10.1364/cleo_si.2020.sth1j.3

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Abstract

D-shape SÌ3N4 waveguides are fabricated by dielectric lift-off process. We measure ultra-low loss for a 90nm-thick core of 2.42 dB/m at 1550 nm and a loaded Q-factor of 1.12x10 6 for a 0.8 mm radius resonator.

Keywords:

Fabrication Materials science Dielectric Silicon nitride Resonator Lift (data mining) Silicon Optoelectronics RADIUS Core (optical fiber) Nitride Optics Composite material Physics Computer science Layer (electronics)

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Fiber Laser Technologies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Low-loss D-shape Silicon Nitride Waveguides Using a Dielectric Lift-off Fabrication Process

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