Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition

Yongjun Wu; Fa Cao; Xiaohong Ji

doi:10.1007/s10854-020-04292-9

ScienceGate Book Chapters

JOURNAL ARTICLE

Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition

Yongjun Wu Fa Cao Xiaohong Ji

Year: 2020 Journal: Journal of Materials Science Materials in Electronics Vol: 31 (20)Pages: 17365-17374 Publisher: Springer Science+Business Media

DOI: 10.1007/s10854-020-04292-9

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science Electrical resistivity and conductivity Thin film Doping Substrate (aquarium) Atomic layer deposition Layer (electronics) Deposition (geology) Transmittance Transparent conducting film Analytical Chemistry (journal) Optoelectronics Composite material Nanotechnology Organic chemistry Chemistry

Metrics

Cited By

1.38

FWCI (Field Weighted Citation Impact)

Refs

0.78

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Copper-based nanomaterials and applications

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical and electrical properties of Al-doped ZnO thin films by atomic layer deposition

Metrics

Citation History

Topics

Related Documents

The Electrical and Optical Properties of Al-Doped ZnO Thin Films Prepared by Atomic Layer Deposition

Structural, electrical, and optical properties of atomic layer deposition Al-doped ZnO films

Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition

Electrical and Optical Properties of Al-doped ZnO Films Deposited by Atomic Layer Deposition

Atomic layer deposition of Al-doped ZnO thin films