Fabrication and Evaluation of Aluminum Nitride/MOSFET Based Strain Sensor with High Gauge Factor

Mengshi Zhu; Naoki Inomata; N. Adachi; Atsushi Sakurai; M. Nomura; Takahito Ono

doi:10.7567/ssdm.2018.g-7-06

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Fabrication and Evaluation of Aluminum Nitride/MOSFET Based Strain Sensor with High Gauge Factor

Mengshi Zhu Naoki Inomata N. Adachi Atsushi Sakurai M. Nomura Takahito Ono

Year: 2018 Journal: Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials

DOI: 10.7567/ssdm.2018.g-7-06

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Keywords:

Gauge factor Fabrication Strain gauge Nitride MOSFET Aluminium Materials science Optoelectronics Gauge (firearms) Electronic engineering Electrical engineering Engineering Composite material Metallurgy Transistor Medicine

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Fabrication and Evaluation of Aluminum Nitride/MOSFET Based Strain Sensor with High Gauge Factor

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