JOURNAL ARTICLE

Fabrication and Evaluation of Aluminum Nitride/MOSFET Based Strain Sensor with High Gauge Factor

Mengshi ZhuNaoki InomataN. AdachiAtsushi SakuraiM. NomuraTakahito Ono

Year: 2018 Journal:   Extended Abstracts of the 2018 International Conference on Solid State Devices and Materials
Keywords:
Gauge factor Fabrication Strain gauge Nitride MOSFET Aluminium Materials science Optoelectronics Gauge (firearms) Electronic engineering Electrical engineering Engineering Composite material Metallurgy Transistor Medicine

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Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Sensor Technology and Measurement Systems
Physical Sciences →  Computer Science →  Computer Networks and Communications
Advanced Sensor Technologies Research
Physical Sciences →  Engineering →  Biomedical Engineering
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