Characterization of Titanium Dioxide (TiO₂) Nanotubes for Resistive-type Humidity Sensor

Abstract

A resistive-type humidity sensor based on Titanium Dioxide nanotubes was prepared. Anodization process is used to synthesize the Titanium Dioxide (TiO ₂ ) thin film nanostructures. Titanium was used as an anode, while platinum as the cathode in an electrochemical cell filled with an electrolyte solution. Four different voltages for the anodization process are 10V, 15V, 20V and 30V. Each sample was fabricated at room temperature for 60 minutes. There are two types of electrolytes used in this study: with acid and without acid. From XRD analysis, oxide conversion is identified as a mixture of anatase and rutile at 10V. FESEM results showed that the surface morphology of titanium after being anodized at different voltages. The humidity sensing was set in the of 40%RH to 90%RH for 3 cycles. Amongst the sample without acid, the sample of 15V produced the highest humidity sensing level.