Flexible Humidity and Pressure Sensors Realized by Molding and Inkjet Printing Processes with Sandwich Structure

Abstract

Abstract Flexible and wearable devices are important parts toward the realization of artificial intelligence and have an irreplaceable advantage over traditional rigid sensors. In this work, a film with double surface structure is prepared by using sandpaper and the leather with a rhombic structure as a mold, thereby obtaining a sandwich structure resistive type pressure sensor, which has high sensitivity (77.78 kPa −1 , 24 Pa minimum detection) and wide detection range (0.024–230 kPa). The sensors have fast response time (30 ms) and high reliability over 5000 repetitive cycles. The humidity sensor is printed on the top layer of the sensor by using screen printing and inkjet printing technique, and the sandwich structure humidity and pressure sensor is obtained. The humidity sensors show the sensitivities of 0.137/%, 1.57/%, and 11.145/% in the relative humidity range from 25 to 55%, 55 to 70%, and 70 to 80%, respectively. Such sensors not only have excellent capabilities in pressure and humidity detection, but also avoid the complex process of multiple single‐function devices stacked on each other. The applications of sensors in monitoring artery pulse waves, detecting spatial pressure distribution, and sweat is demonstrated.