Inkjet 3D Printed MEMS Vibrational Electromagnetic Energy Harvester

Abstract

Three-dimensional (3D) printing is a powerful tool that enables the printing of almost unlimited geometry in a few hours, from a virtual design to a real structure. In this paper, we present a micro-electromechanical energy harvester that utilized a 3D printed micromechanical structure combined with a miniature permanent magnet and a microelectronic coil towards a hybrid electromagnetic vibrational hybrid energy harvester. Various micromechanical structure geometries were designed, printed, and tested. The characteristic dimensions of the springs were from 200 μm to 400 μm and the total volume of the devices was below 1 cm3. The resonant frequencies (95–340 Hz range), as well as bandwidths (6–23 Hz range), for the developed prototypes were determined. The maximal generated output power was almost 24 μW with a power density up to almost 600 μW/cm3.