Multifunctional Rhinomanometer with Integrated Highly Sensitive Flexible Piezoelectric-Beam-Array Flow and Fast Dynamic Response Humidity Sensors

Abstract

A state-of-the-art wearable rhinomanometer based on a soft functional composite was presented (Fig. 1). This composite consists of piezoelectric beam array and PDMS membrane for flow sensing. Human inhalation and exhalation of air produces back-and-forth motion of this soft composite, which effectively contributes piezoelectric signal output. The lead-free biocompatible BaTiO 3 piezoelectric thin-film fabricated on a $20\ \mu\mathrm{m}$ -thick foil as flow sensors was reported. Different from thermal anemometer technology, the proposed zero-power-consuming flow sensing mechanism not only allows compact integration with the fabricated humidity sensor but increases humidity sensing response and accuracy due to no locally heat generation. We successfully demonstrate that people use the developed rhinomanometer to acquire inhaling/exhaling flow and humidity information.