Transparent capacitive micromachined ultrasonic transducer (CMUT) arrays for real-time photoacoustic applications

Abstract

Photoacoustic imaging has shown great potential for non-invasive high-resolution deep-tissue imaging. Minimizing the optical and acoustic paths for excitation and detection could significantly increase the signal-to-noise ratio. This could be accomplished by transparent transducers permitting through-transducer illumination. However, most ultrasound transducers are not optically transparent. Capacitive micromachined ultrasound transducer (CMUT) technology has compelling properties compared to piezoelectric transducers such as wide bandwidth and high receive sensitivity. Here, we introduce transparent CMUT linear arrays with high transparency in the visible and near-infrared range. To fabricate the devices, we used an adhesive wafer bonding technique using photosensitive benzocyclobutene (BCB) as both a structural and adhesive layer with a glass-indium-tin-oxide (ITO) substrate. Silicon nitride is used as the membrane material ensuring hermiticity and optical transparency. Our fabricated transducer arrays consist of 64 and 128 elements with immersion operation frequency of 8 MHz, enabling high-resolution imaging. ITO, along with thin metal strips, are used as a conductive layer for the top electrodes with minimal impact on device transparency. Fabricated devices have shown average transparency of 70% in the visible wavelength range that goes up to 90% in the near-infrared range. Arrays are wire-bonded to interfacing electronics and connected to a research ultrasound platform for phantom imaging. Arrays exhibited signal-to-noise (SNR) of 40 dB with 30V bias voltage and laser fluence of 13.5 mJ / cm 2 . Arrays with 128 channels provided lateral and axial resolutions of 234 µm and 220 µm , respectively.