JOURNAL ARTICLE

Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

Keywords:
Materials science Wheatstone bridge Piezoresistive effect Cantilever Nanoindenter Fabrication Nanocomposite Composite material Carbon black Laser Doppler vibrometer Acceleration Optoelectronics Elastic modulus Electrical engineering Physics Wavelength

Metrics

15
Cited By
1.08
FWCI (Field Weighted Citation Impact)
28
Refs
0.78
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
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