Laser induced ultrafast combustion synthesis of solution-based AlO<sub>x</sub> for thin film transistors

Emanuel Carlos; Spilios Dellis; N. Kalfagiannis; Λουκάς Κουτσοκέρας; Demosthenes C. Koutsogeorgis; Rita Branquinho; Rodrigo Martins; Elvira Fortunato

doi:10.1039/d0tc01204a

JOURNAL ARTICLE

Laser induced ultrafast combustion synthesis of solution-based AlO_x for thin film transistors

Emanuel Carlos Spilios Dellis N. Kalfagiannis Λουκάς Κουτσοκέρας Demosthenes C. Koutsogeorgis Rita Branquinho Rodrigo Martins Elvira Fortunato

Year: 2020 Journal: Journal of Materials Chemistry C Vol: 8 (18)Pages: 6176-6184 Publisher: Royal Society of Chemistry

DOI: 10.1039/d0tc01204a

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Abstract

Excimer laser annealing (ELA) combined with combustion synthesis leads to high quality metal oxide TFTs in a short processing time.

Keywords:

Materials science Thin-film transistor Combustion Ultrashort pulse Excimer laser Oxide Laser Annealing (glass) Optoelectronics Metal Nanotechnology Metallurgy Optics Physical chemistry

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Laser induced ultrafast combustion synthesis of solution-based AlO_x for thin film transistors

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