Fabricating atom chips with femtosecond laser ablation

Abstract

We report on the microfabrication of atom chips using a femtosecond laser ablation technique to arbitrarily sculpture both thin conductive metal films and permanent magnetic materials. We have measured the threshold fluences for a variety of materials relevant to atom chip development (Au, Ag, Cu, Cr, Ni, TbGdFeCo, SmCo, CoCr). The quality of the ablation process is investigated by extracting the power spectral density of the edge roughness from composite scanning electron microscope images and through the use of a magnetoresistance microscope to measure the associated magnetic field noise. Finally, we present results from a sculptured wire which produces an array of tunable double wells designed for near-surface force sensing with Bose-Einstein condensates.