Ultrasonic Frequency MEMS Disk Resonator For Energy Harvesting Application

Abstract

MEMS resonator is a micro-vibrating mechanical structure which is capable of vibrating at its resonant frequency. The resonator is usually excited at its fundamental resonance mode called as natural mode of vibration. However, excitations at its higher-order modes are also possible. The novel techniques to fabricate the micro-resonating structure on the flexible substrate are also discussed in this paper. MEMS resonators have been widely used in various applications. The micro-vibrating structure with their high quality factors, small size, low power consumption, and low cost batch fabrication, makes it promising way for wide application. The comparative analysis of the two emerging materials i.e ZnO and AIN are done among which the most suited has been suggested for the energy harvesting application. This paper presents the analysis and modeling of out of plane MEMS disk resonator. The main parameters that describe the operation of the disk are the natural frequency, material choice, mode of vibration.