Spatially characteristics of an atmospheric-pressure surface dielectric barrier discharge plasma

Abstract

This paper investigates the spatially characteristics of an atmospheric-pressure surface dielectric barrier discharge plasma by optical emission spectroscopic diagnostics. With the increase of distance from the upper electrode, both N2 vibrational temperature and electron density are greatly elevated and in the ranges of 0.15~0.4eV and 0.5~4×1012cm-3, respectively. The dependence of the electron temperature on distance from upper electrode appears non-monotonic, and the electron temperature is in the range of 1.7~3eV.