Flexible Pressure Sensors with a Wide Detection Range Based on Self-Assembled Polystyrene Microspheres

Abstract

Flexible pressure sensors are important components of electronic skin and flexible wearable devices. Most existing piezoresistive flexible pressure sensors have obtained high sensitivities, however, they have relatively small pressure detection ranges. Here, we report flexible pressure sensors with a wide detection range using polydimethylsiloxane (PDMS) as the substrate, carbon nanotube films as the electrode material, and self-assembled polystyrene microsphere film as the microstructure layer. The obtained pressure sensor had a sandwich structure, and had a wide pressure detection range (from 4 kPa to 270 kPa), a sensitivity of 2.49 kPa−1, and a response time of tens of milliseconds. Two hundred load–unload cycles indicated that the device had good stability. In addition, the sensor was obtained by large-area fabrication with a low power consumption. This pressure sensor is expected to be widely used in applications such as electronic skin and flexible wearable devices.