Insights into plasma‐assisted polymerization at atmospheric pressure by spectroscopic diagnostics

Abstract

Abstract In the present work, a polydiagnostic study of an atmospheric pressure plasma jet specifically designed for the deposition of coatings by using an Ar/tetraethyl orthosilicate (TEOS) mixture is undertaken. Both passive and active diagnostic methods are utilized to shed light on the complexity of gas‐phase mechanisms of precursor fragmentation. A detailed characterization is performed by (fast imaging) optical emission spectroscopy (OES) to clarify the spatial–temporal behavior of excited species. The influence of the TEOS admixture on gas temperature is studied by OES and Rayleigh scattering techniques. The evolution of streamers and their influence on radical formation in the treatment zone is also discussed.