Inkjet Printing: Inkjet‐Printed and Deep‐UV‐Annealed YAlO_x Dielectrics for High‐Performance IGZO Thin‐Film Transistors on Flexible Substrates (Adv. Electron. Mater. 6/2019)

Abstract

Recent developments in inkjet printing have shown it to be a viable method for low-cost and large-area coating of oxide materials. In article 1800843, S. Bolat et al. report the low-temperature synthesis of yttrium aluminum oxide (YAlOx) dielectric layers through a combination of inkjet printing of sol–gel precursors and heat-assisted deep ultraviolet (DUV) annealing. Using this process, the post-deposition annealing temperature required is reduced to a level compatible with sensitive polymer substrates.