Research on the Flexible Three-Dimensional Force Sensor Based on Microstructure

Abstract

A flexible three-dimensional force sensor based on microstructures is proposed. The structure design and fabrication of the sensor are introduced. The principle of the three-dimensional force detection is expounded. The mathematical model of the force on the sensor is established. The tactile sensing mechanism is analyzed by finite element analysis. A data acquisition system is built to calibrate and verify the sensor. The BP neural network is used to decouple the sensor. The results show that the sensor is simple and flexible in structure and can realize the three-dimensional force detection.