Development of grating-based precise displacement measurement technology

JOURNAL ARTICLE

Year: 2019 Journal: Chinese Optics Vol: 12 (4)Pages: 741-752

DOI: 10.3788/co.20191204.0741

Keywords:

Grating Displacement (psychology) Optics Computer science Materials science Physics Psychology

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0.62

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0.66

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Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Optical Systems and Laser Technology

Physical Sciences → Engineering → Electrical and Electronic Engineering