A hybrid YSZ/SnO<sub>2</sub>/MEMS SO<sub>2</sub> gas sensor

Ting‐Jen Hsueh; Chun-Liang Lu

doi:10.1039/c9ra03607e

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A hybrid YSZ/SnO₂/MEMS SO₂ gas sensor

Ting‐Jen Hsueh Chun-Liang Lu

Year: 2019 Journal: RSC Advances Vol: 9 (48)Pages: 27800-27806 Publisher: Royal Society of Chemistry

DOI: 10.1039/c9ra03607e

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Abstract

This study uses a solid YSZ electrolyte film in a SnO₂ MEMS SO₂ gas sensor of the semiconductor type to enhance the redox reaction.

Keywords:

Yttria-stabilized zirconia Microelectromechanical systems Materials science Optoelectronics Nanotechnology Chemical engineering Metallurgy Cubic zirconia Ceramic Engineering

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Chemical Sensor Technologies

Physical Sciences → Engineering → Biomedical Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

A hybrid YSZ/SnO₂/MEMS SO₂ gas sensor

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