JOURNAL ARTICLE

Design, fabrication and characterization of high temperature thin film heat flux sensors

Congchun ZhangJianze HuangJuan LiShenyong YangGuifu DingWei Dong

Year: 2019 Journal:   Microelectronic Engineering Vol: 217 Pages: 111128-111128   Publisher: Elsevier BV
Keywords:
Thermopile Materials science Heat flux Fabrication Optoelectronics Silicon Insulator (electricity) Silicon on insulator Thin film Thermal Tungsten Surface micromachining Composite material Optics Heat transfer Nanotechnology Metallurgy

Metrics

34
Cited By
0.86
FWCI (Field Weighted Citation Impact)
18
Refs
0.70
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced Sensor Technologies Research
Physical Sciences →  Engineering →  Biomedical Engineering
Refrigeration and Air Conditioning Technologies
Physical Sciences →  Engineering →  Mechanical Engineering
Heat Transfer and Boiling Studies
Physical Sciences →  Engineering →  Mechanical Engineering
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