Design, fabrication and characterization of high temperature thin film heat flux sensors

Congchun Zhang; Jianze Huang; Juan Li; Shenyong Yang; Guifu Ding; Wei Dong

doi:10.1016/j.mee.2019.111128

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JOURNAL ARTICLE

Design, fabrication and characterization of high temperature thin film heat flux sensors

Congchun Zhang Jianze Huang Juan Li Shenyong Yang Guifu Ding Wei Dong

Year: 2019 Journal: Microelectronic Engineering Vol: 217 Pages: 111128-111128 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2019.111128

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Keywords:

Thermopile Materials science Heat flux Fabrication Optoelectronics Silicon Insulator (electricity) Silicon on insulator Thin film Thermal Tungsten Surface micromachining Composite material Optics Heat transfer Nanotechnology Metallurgy

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Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

Refrigeration and Air Conditioning Technologies

Physical Sciences → Engineering → Mechanical Engineering

Heat Transfer and Boiling Studies

Physical Sciences → Engineering → Mechanical Engineering

Design, fabrication and characterization of high temperature thin film heat flux sensors

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