Multi-Frequency Piezoelectric Micromachined Ultrasonic Transducers

Abstract

In this paper multi-frequency piezoelectric MEMS ultrasonic transducers (pMUTs) are designed, characterized and tested for nondestructive evaluation (NDE) of solids. The transducers operate in flexural mode, and are tuned to three different frequencies namely 1 MHz, 1.5 MHz and 2 MHz. The microstructural layers consist of aluminum nitride (AlN) as an active sensing layer sandwiched between metal and doped silicon electrodes. pMUTs are designed with octagonal and circular membranes. The vibration of silicon membrane assists piezoelectric element to convert energies. The transducers are modeled numerically to obtain their dynamic characteristics. Piezoelectric Multi-User MEMS Processes (PiezoMUMPs) are utilized to manufacture pMUTs. The electromechanical characterization shows that the circular design has higher figure of merit as compared to the octagonal design due to more uniform stress distribution transferred between silicon and AlN layers. It is demonstrated that the piezeoelectric layer should be deposited up to the inflection point of diaphragm deformation. This avoids the signal cancellation due to opposite polarization. The performance of pMUTs as receiver is evaluated to detect the creep damage by implementing nonlinear ultrasonic testing (NLUT). NLUT is based on detecting higher harmonics in solids due to heterogeneity in materials. Significant amplification in the second harmonics is obtained due to highly narrowband and low damping characteristics of pMUTs that improves the resolution of NLUT to detect subwavelength damage. Higher harmonics can be detected using small footprint pMUT device, which is not possible with conventional piezoelectric transducers. This allows better spatial resolution of nonlinear measurement.