Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

Vinsensia Ade Sugiawati; Florence Vacandio; Carine Perrin-Pellegrino; Alina Galeyeva; Andrey Kurbatov; Thierry Djenizian

doi:10.1038/s41598-019-47464-2

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Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

Vinsensia Ade Sugiawati Florence Vacandio Carine Perrin-Pellegrino Alina Galeyeva Andrey Kurbatov Thierry Djenizian

Year: 2019 Journal: Scientific Reports Vol: 9 (1)Pages: 11172-11172 Publisher: Nature Portfolio

DOI: 10.1038/s41598-019-47464-2

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Keywords:

Materials science Annealing (glass) Sputtering Thin film Electrochemistry Scanning electron microscope Electrode Cathode Cyclic voltammetry Analytical Chemistry (journal) Porosity Microstructure Chemical engineering Nanotechnology Composite material Chemistry Chromatography

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Advancements in Battery Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Battery Technologies Research

Physical Sciences → Engineering → Automotive Engineering

Supercapacitor Materials and Fabrication

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Sputtered Porous Li-Fe-P-O Film Cathodes Prepared by Radio Frequency Sputtering for Li-ion Microbatteries

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