Microfabricated Solid State Thin Film Lithium Batteries

Raphaël Salot; Jean‐Pierre Pereira‐Ramos

doi:10.1557/proc-0973-bb01-02

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Microfabricated Solid State Thin Film Lithium Batteries

Raphaël Salot Raphaël Salot Jean‐Pierre Pereira‐Ramos

Year: 2006 Journal: MRS Proceedings Vol: 973 Publisher: Cambridge University Press

DOI: 10.1557/proc-0973-bb01-02

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Keywords:

Materials science Nanotechnology Microfabrication Fabrication Microelectronics Thin film Separator (oil production) Wafer Reactive-ion etching Electrode Optoelectronics Etching (microfabrication) Layer (electronics)

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Advancements in Battery Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electrocatalysts for Energy Conversion

Physical Sciences → Energy → Renewable Energy, Sustainability and the Environment

Advanced Battery Technologies Research

Physical Sciences → Engineering → Automotive Engineering

Microfabricated Solid State Thin Film Lithium Batteries

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