BOOK-CHAPTER

Focused-Ion-Beam-Induced Deposition (FIB-ID)

Keywords:
Focused ion beam Materials science Ion beam Deposition (geology) Ion Ion beam deposition Ion beam-assisted deposition Nanotechnology Chemistry Geology

Metrics

7
Cited By
2.58
FWCI (Field Weighted Citation Impact)
0
Refs
0.92
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
© 2026 ScienceGate Book Chapters — All rights reserved.