Focused-Ion-Beam-Induced Deposition (FIB-ID)

Bharat Bhushan

doi:10.1007/978-94-017-9780-1_100348

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Focused-Ion-Beam-Induced Deposition (FIB-ID)

Bharat Bhushan

Year: 2016 Pages: 1242-1242

DOI: 10.1007/978-94-017-9780-1_100348

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Keywords:

Focused ion beam Materials science Ion beam Deposition (geology) Ion Ion beam deposition Ion beam-assisted deposition Nanotechnology Chemistry Geology

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0.92

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Topics

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Focused-Ion-Beam-Induced Deposition (FIB-ID)

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Citation History

Topics

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Focused-Ion-Beam Chemical-Vapor-Deposition (FIB-CVD)

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