Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment

Yeongjun Kim; Shin Jang; Je Hoon Oh

doi:10.1016/j.mee.2019.111002

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Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment

Yeongjun Kim Shin Jang Je Hoon Oh

Year: 2019 Journal: Microelectronic Engineering Vol: 215 Pages: 111002-111002 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2019.111002

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Keywords:

Polydimethylsiloxane Materials science Dielectric Layer (electronics) Fabrication Capacitive sensing Pressure sensor Porosity Elastomer Composite material Optoelectronics PDMS stamp Microwave Nanotechnology Electrical engineering

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Tactile and Sensory Interactions

Life Sciences → Neuroscience → Cognitive Neuroscience

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment

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