JOURNAL ARTICLE

Preparation of Irregular Silica Nanoparticles by the Polymer Templating for Chemical Mechanical Polishing of Sapphire Substrates

Yue DongHong LeiYi ChenWenqing LiuLei XuTianxian WangSanwei Dai

Year: 2019 Journal:   Journal of Electronic Materials Vol: 48 (7)Pages: 4598-4606   Publisher: Springer Science+Business Media
Keywords:
Chemical-mechanical planarization Materials science Nanoparticle Sapphire Polymer X-ray photoelectron spectroscopy Chemical engineering Polishing Surface roughness Nanotechnology Composite material Optics

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13
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0.86
FWCI (Field Weighted Citation Impact)
24
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0.69
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Citation History

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Advanced machining processes and optimization
Physical Sciences →  Engineering →  Mechanical Engineering
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