ULTRA HIGH SENSITIVITY GRAPHENE PIEZORESISTIVE PRESSURE SENSOR

Abstract

We demonstrate the first-ever pressure sensor utilizing graphene piezoresistors demonstrating the sensitivity as high as 323 µV/V/mmHg.This sensitivity is two orders of magnitudes higher than the commercial Omega PX140x series and 36 times higher than that of the reported carbon nanotube based transducers [1].Our sensor consists of a 400nm Si x N y membrane on silicon substrate with 10nm/140nm thick Cr/Au electrodes on top where the graphene layer is transferred on top of this structure.Our pressure sensor highly nonlinear, but can still be useful for applications where ultra-high sensitivity is needed and table lookup can be used.