CMOS compatible silicon slot ring resonator sensor

Abstract

We propose a fully CMOS compatible optical sensor based on the ring resonator mechanism. The waveguide structure of the sensor utilizes the silicon on insulator slot waveguide configuration. The analyte fills the slot and the cladding of the ring resonator. Since the optical power is enhanced and confined within the slot, then the overlap between the analyte and the optical power is maximized. The sensitivity of the sensor was measured to be 350 nm/RIU at the optical wavelength of 1.55 m.