Improvement in lateral resolution of through-transmission scanning acoustic tomography using capacitive micromachined ultrasound transducer

Taiichi Takezaki; Masakazu Kawano; Shuntaro Machida; Daisuke Ryuzaki

doi:10.1016/j.microrel.2018.12.001

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Improvement in lateral resolution of through-transmission scanning acoustic tomography using capacitive micromachined ultrasound transducer

Taiichi Takezaki Masakazu Kawano Shuntaro Machida Daisuke Ryuzaki

Year: 2018 Journal: Microelectronics Reliability Vol: 93 Pages: 22-28 Publisher: Elsevier BV

DOI: 10.1016/j.microrel.2018.12.001

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Keywords:

Capacitive micromachined ultrasonic transducers Capacitive sensing Materials science Transducer Ultrasonic sensor Center frequency Piezoelectricity Acoustics Bandwidth (computing) Optics Optoelectronics Electrical engineering Telecommunications Physics Engineering

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Ultrasonics and Acoustic Wave Propagation

Physical Sciences → Engineering → Mechanics of Materials

Flow Measurement and Analysis

Physical Sciences → Engineering → Mechanics of Materials

Electrical and Bioimpedance Tomography

Physical Sciences → Engineering → Electrical and Electronic Engineering

Improvement in lateral resolution of through-transmission scanning acoustic tomography using capacitive micromachined ultrasound transducer

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