A Piezoelectric Micro-Machined Ultrasonic Transducer Array Based on Flexible Substrate

Abstract

Flexible electronic devices are developing rapidly, especially in the medical field. This paper reports a flexible piezoelectric micro-machined ultrasonic transducer (FPMUT) array. In the designing process, we utilize the flexible interconnection as the electrical connecting wire between piezoelectric ceramics array. Meanwhile, the polydimethylsiloxane (PDMS) films act as flexible substrates for the whole device. It has flexibility and good conformal contacting with skin surfaces. This sandwich-structure of the FPMUT has a combination of rigid and flexible features. It also has great potential for the application in ultrasound medicine in the future and could bring them closer to commercial production.