Monolithically Integrated, CMOS-Compatible SiN Photonics for Sensing Applications

Abstract

As a leading provider of sensing solutions ams AG is developing semiconductor sensors in a wide variety of fields. One of the key competences of ams AG lies in optical sensing. To widen the company’s portfolio in this field we have been developing processes for fully integrated CMOS compatible photonic components based on Si3N4 in the last few years. This contribution will give an overview of the Si3N4 process as a post-processing flow for standard CMOS, some basic photonic building blocks and their properties, and an example for their use in the field of medical applications.