Microprocessing of various materials using femtosecond laser pulses

Abstract

Comprehensive results on femtosecond-laser microstructuring of silicon, tungsten carbide hard metal, fused silica and Pyrex glass using a Ti: Sapphire-Laser with regenerative amplifier are presented. Based on our studies of the ablation behaviour of those materials in dependence of the laser parameters three-dimensional microstructures have been produced and characterized by scanning electron microscopy. The quality of those microstructures that could be obtained for each material will be shown and discussed.