Level-set strategy for inverse DSA-lithography

Gaddiel Ouaknin; Nabil Laachi; Kris T. Delaney; Glenn H. Fredrickson; Frédéric Gibou

doi:10.1016/j.jcp.2018.09.021

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Level-set strategy for inverse DSA-lithography

Gaddiel Ouaknin Nabil Laachi Kris T. Delaney Glenn H. Fredrickson Frédéric Gibou

Year: 2018 Journal: Journal of Computational Physics Vol: 375 Pages: 1159-1178 Publisher: Elsevier BV

DOI: 10.1016/j.jcp.2018.09.021

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Keywords:

Set (abstract data type) Context (archaeology) Inverse Polygon mesh Block (permutation group theory) Computer science Lithography Algorithm Field (mathematics) Mathematical optimization Template Inverse problem Mathematics Geometry Physics Mathematical analysis Optics Pure mathematics Geology

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Block Copolymer Self-Assembly

Physical Sciences → Materials Science → Materials Chemistry

Advancements in Photolithography Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Model Reduction and Neural Networks

Physical Sciences → Physics and Astronomy → Statistical and Nonlinear Physics

Level-set strategy for inverse DSA-lithography

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