Design, Fabrication and Characterization of a Biologically Inspired MEMS Directional Microphone

Veda Sandeep Nagaraja; K.J Rudresha; S.L. Pinjare

doi:10.1109/icsens.2018.8630304

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Design, Fabrication and Characterization of a Biologically Inspired MEMS Directional Microphone

Veda Sandeep Nagaraja K.J Rudresha S.L. Pinjare

Year: 2018 Pages: 1-4

DOI: 10.1109/icsens.2018.8630304

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Keywords:

Characterization (materials science) Microelectromechanical systems Fabrication Microphone Engineering Computer science Nanotechnology Materials science Electrical engineering Medicine

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Microfluidic and Bio-sensing Technologies

Physical Sciences → Engineering → Biomedical Engineering

Modular Robots and Swarm Intelligence

Physical Sciences → Engineering → Mechanical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Design, Fabrication and Characterization of a Biologically Inspired MEMS Directional Microphone

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