Ultra-High Density, Thin-Film Tantalum Capacitors with Improved Frequency Characteristics for MHz Switching Power Converters

Robert Grant Spurney; Himani Sharma; P. Markondeya Raj; Rao Tummala; Naomi Lollis; Mitch Weaver; Saumya Gandhi; Matt Romig; Holger Brumm

doi:10.1007/s11664-018-6466-4

JOURNAL ARTICLE

Ultra-High Density, Thin-Film Tantalum Capacitors with Improved Frequency Characteristics for MHz Switching Power Converters

Robert Grant Spurney Himani Sharma P. Markondeya Raj Rao Tummala Naomi Lollis Mitch Weaver Saumya Gandhi Matt Romig Holger Brumm

Year: 2018 Journal: Journal of Electronic Materials Vol: 47 (9)Pages: 5632-5639 Publisher: Springer Science+Business Media

DOI: 10.1007/s11664-018-6466-4

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Keywords:

Capacitor Materials science Tantalum capacitor Tantalum Film capacitor Miniaturization Optoelectronics Capacitance Power density Dielectric Thin film Equivalent series resistance Filter capacitor Tantalum nitride Wafer Electrical engineering Electrolytic capacitor Electrode Voltage Power (physics) Nanotechnology

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Ultra-High Density, Thin-Film Tantalum Capacitors with Improved Frequency Characteristics for MHz Switching Power Converters

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