JOURNAL ARTICLE
Pull-in Voltage Analysis of Electrostatically Actuated Stepped Micro-cantilever Beam
Year: 2018 Journal: Journal of Mechanical Engineering Vol: 54 (8)Pages: 217-217
Keywords:
Cantilever Beam (structure) Voltage Materials science Acoustics Physics Engineering Optics Electrical engineering Composite material
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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