Fiber-optic Fabry-Perot interferometer based high sensitive cantilever microphone

Ke Chen; Zhenfeng Gong; Min Guo; Shaochen Yu; Chao Qu; Xinlei Zhou; Qingxu Yu

doi:10.1016/j.sna.2018.06.010

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Fiber-optic Fabry-Perot interferometer based high sensitive cantilever microphone

Ke Chen Zhenfeng Gong Min Guo Shaochen Yu Chao Qu Xinlei Zhou Qingxu Yu

Year: 2018 Journal: Sensors and Actuators A Physical Vol: 279 Pages: 107-112 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2018.06.010

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Keywords:

Fabry–Pérot interferometer Cantilever Interferometry Materials science Microphone Optics Optical fiber Sensitivity (control systems) Sound pressure Acoustics Optoelectronics Electronic engineering Physics Composite material Engineering

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Fiber Optic Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fiber-optic Fabry-Perot interferometer based high sensitive cantilever microphone

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