Structure and Design of Microgrippers: A Survey

Abstract

The increasing need for Microelectromechanical Systems (MEMS) leads to significant efforts devoted to the development of microgrippers that would allow the manipulation of small structures in the μm range. Various microgrippers with their targeted applications have been reported in the literature. This work presents an overview on microgripper development with the emphasis on structure design and design theories. The challenges and limitations of existing technologies and prospects for new technologies in the microgripper development are also addressed.