Nanoparticle production from HMDSO in atmospheric pressure argon‐oxygen plasma

Abstract

A dielectric barrier discharge containing argon and oxygen is used to dissociate HMDSO with the purpose of producing silica‐like particles. Solid material is deposited in an electrostatic precipitator and analyzed with SEM, FTIR, and weight measurements. The variation of oxygen concentration shows an optimum for particle yield at an oxygen‐to‐monomer ratio of 20. Increasing yield and nanoparticle formation are also found with increasing excitation frequency and explained with the corresponding higher power input and nanoparticle survival rates from aerosol theory. Nanoparticles only form when residence time allows decomposition, nucleation, and growth.