Femtosecond (fs) laser has the advantages of good beam quality and high precision, which is one of the best methods for processing optical fiber mini-sensors, but residual debris on the surface of the machined fiber structure will affect the sensor performance. In this paper, the laser parameters of laser pulses and translation speed were investigated for the quality of fiber micro-cavities contrast in the air and the water, it was proved the effectiveness of using liquid-assisted to improve the quality of laser micromachining.
Min WangQing YeYanqin RenFan Yang
Min WangLiu Fu-FeiXian ZhouDai YutangMinghong Yang