Pulsed laser deposition of thin films

L. R. Shaginyan

doi:10.1016/b978-012512908-4/50016-3

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Pulsed laser deposition of thin films

L. R. Shaginyan

Year: 2002 Elsevier eBooks Pages: 627-673 Publisher: Elsevier BV

DOI: 10.1016/b978-012512908-4/50016-3

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Keywords:

Evaporation Condensation Deposition (geology) Composition (language) Substrate (aquarium) Materials science Thin film Sputtering Flux (metallurgy) Chemical engineering Pulsed laser deposition Physical vapor deposition Analytical Chemistry (journal) Chemical physics Chemistry Nanotechnology Chromatography Metallurgy Thermodynamics

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Pulsed laser deposition of thin films

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