Structural, optical, and electrical properties of Cu-doped ZrO <sub>2</sub> films prepared by magnetron co-sputtering

Nian-Qi Yao; Zhichao Liu; Guang-Rui Gu; Baojia Wu

doi:10.1088/1674-1056/26/10/106801

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Structural, optical, and electrical properties of Cu-doped ZrO ₂ films prepared by magnetron co-sputtering

Nian-Qi Yao Zhichao Liu Guang-Rui Gu Baojia Wu

Year: 2017 Journal: Chinese Physics B Vol: 26 (10)Pages: 106801-106801 Publisher: IOP Publishing

DOI: 10.1088/1674-1056/26/10/106801

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Keywords:

Materials science Doping Sputter deposition Cavity magnetron Optoelectronics Sputtering Analytical Chemistry (journal) Thin film Nanotechnology Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Structural, optical, and electrical properties of Cu-doped ZrO ₂ films prepared by magnetron co-sputtering

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